Ion Mobility Spectrometer

ABSTRACT

An ion mobility spectrometer is described having an ion filter in the form of at least one ion channel having a plurality of electrodes. A time-varying electric potential applied to the conductive layers allows the filler to selectively admit ion species. The electric potential has a drive and a transverse component, and in preferred embodiments each of the electrodes is involved in generating a component of both the drive and transverse fields. The device may be used without a drift gas flow, Microfabrication techniques are described for producing microscale spectrometers, as are various uses of the spectrometer.

FIELD OF THE INVENTION

The present invention relates to an ion mobility spectrometer, and moreparticularly to a field asymmetric ion mobility (FAIM) spectrometer.Certain aspects of the invention relate to a micro machined FAIMspectrometer. Aspects of the invention also relate to methods ofperforming ion mobility spectrometry, and to components for use in sucha spectrometer.

BACKGROUND TO THE INVENTION

Ion mobility spectrometry is a versatile technique used to detectpresence of molecular species in a gas sample. The technique hasparticular application in detection of explosives, drugs, and chemicalagents in a sample, although it is not limited to these applications.Portable detectors are commonly used for security screening, and in thedefense industry. However, conventional portable devices are stillnonetheless relatively large.

Ion mobility spectrometry relies on the differential movement Ofdifferent ion species through an electric field to a detector; byappropriate selection of the parameters of the electric field, ionshaving differing properties will reach the detector at differing times,if at all. Time of flight (TOF) ion mobility spectrometry measures thetime taken by ions when subject to an electric field to travel along adrift tube to a detector against a drift gas flow. By varying theelectric field ions of different characteristics will reach the detectorat different times, and the composition of a sample can be analysed.This form of spectrometry relies on the length of the drift tube for itsresolution; the longer the drift tube, the more powerful the detector.This restricts the possible miniaturisation of such spectrometers, sincethere is a limit to the lower size of the drift tube which mayeffectively be used, Further, given that relatively high electric fieldstrengths are necessary, the restriction on drift tube length alsoresults in the need to use relatively high voltages in the device, whichmay be potentially hazardous to the operator and further restricts thepossibility of miniaturisation of the device.

A variation on TOF ion mobility spectrometry is described in U.S. Pat.No. 5,789,745, which makes use of a moving electrical potential to moveions against a drift gas flow towards a detector. A plurality of spacedelectrodes are alternately pulsed to generate a moving potential well,which carries selected ions along with it. This device is unsuited tominiaturisation due to, among other reasons, the need for a pump toproduce the drift gas flow.

Field asymmetric ion mobility spectrometry (FAIMS) is a derivative oftime of flight ion mobility spectrometry (TOFIMS), which potentiallyoffers a smaller form factor; however, existing designs use moving gasflows and high voltages, which are undesirable for microchipimplementations. Scaling is further hindered by molecular diffusion, aneffect that becomes significant in the micron regime. Backgroundinformation relating to FAIMs can be found in L. A. Buryakov et al. Int.J. Mass. Spectrom. Ion Process. 128 (1993) 143; and E. V. Krylov et al.Int. J. Mass. Spectrom. Ion Process. 225 (2003) 39-51; herebyincorporated by reference.

Conventional FAIMS operates by drawing air at atmospheric pressure intoa reaction region where the constituents of the sample are ionized.Chemical agents in vapour-phase compounds form ion clusters when theyare exposed to their parent ions. The mobility of the ion clusters ismainly a function of shape and weight. The ions are blown between twometal electrodes, one with a low-voltage DC bias and the other with aperiodic high-voltage pulse waveform, to a detector plate where theycollide and a current is registered. Ions are quickly driven toward oneelectrode during the pulse phase and slowly driven toward the oppositeelectrode between pulses. Some ions impact an electrode before reachingthe detector plate; other ions with the appropriate differentialmobility reach the end, making this device a sort of differentialmobility ion filter. A plot of the current generated versus DC biasprovides a characteristic differential ion mobility spectrum. Theintensity of the peaks in the spectrum, which corresponds to the amountof charge, indicates the relative concentration of the agent.

While this arrangement offers the possibility for greaterminiaturisation than conventional TOFIMS, the need to generate a gasflow requires the presence of a pump, diaphragm or similar, which usingpresent technology limits the lower size of such a device.Representative examples of such devices are described in U.S. Pat. No.6,495,823 and U.S. Pat. No. 6,512,224.

It would be of benefit to provide miniaturised ion mobilityspectrometers for use in sensing techniques; not only would these besuitable for covert use or for large scale distribution, the smallersize will allow use of lower voltages in the device. Devices with no orfewer moving parts than conventional devices would also be of benefit,in that they would be more robust than conventional sensors, and sosuitable for deployment in high-traffic areas or in harsh environments.

The present inventors have developed a further modification of FAIMS,which does not require a drift gas flow for its operation. Instead, anelectric field is used to cause ions to move toward the detector. Thisallows for a solid state construction which does not require a gas pumpor similar, so allowing for greater miniaturisation of the device thanwould otherwise be possible, as well as a more robust construction. Thesystem as a whole can be reduced in size and cost, since no pump isnecessary and the electronics may be reduced in size. Size reductionpermits smaller gap sizes between electrodes and hence lower voltages,leading to smaller, more integrated electronics, more precise andcontrollable waveforms, and improved performance in terms of power usageand resolution. The spectrum of detected ions can provide information onmultiple analytes simultaneously, since the ion filter is readilyretunable simply by altering the electric field properties. Detection ofadditional analytes may be incorporated by altering the softwarecontrolling the filter and subsequent analysis, so making the systemhighly customisable.

Other advantages of the present invention include the reduction of falsepositives by adjustment of multiple parameters over time, which againmay be achieved with software control. Many detectors may be networkedtogether to combine outputs, to reduce the deleterious effects of localinterferents and increase classification confidence, as well as to makethe system as a whole more robust.

Finally, the present invention is highly sensitive, allowing detectionat trace levels, and rapid. With a reduced distance between ioniser anddetector the time for which ions must exist to be detected is reduced,so allowing detection of short-lived ions. The system may be operated atlow voltages, and at low power, allowing for longer operational use in arange of environments.

SUMMARY OF THE INVENTION

According to a first aspect of the present invention, there is providedan ion mobility spectrometer comprising an ionizer, an ion filter, andan ion detector;

-   -   wherein the ion filter defines at least one ion channel along        which ions may pass from the ionizer to the ion detector; and    -   wherein the ion filter comprises a plurality of electrodes        disposed proximate the ion channel;    -   the spectrometer further comprising electrode control means for        controlling the electrodes such that a first drive electric        field is generated along the length of the ion channel, and a        second transverse electric field is generated orthogonal to the        first, and wherein each of said plurality of electrodes is        involved in generating a component of both the drive and        transverse electric fields.

This arrangement allows for the drive electric field to be used topropel ions through the channel while the transverse electric field maybe used to selectively affect the mobility of ions according toparameters such as their charge. The spectrometer of the presentinvention may therefore be used without a drift gas flow, and sorequires fewer moving parts than conventional spectrometers. Inaddition, a long drift tube is not necessary for the present inventionto operate effectively. The drive and transverse electric fields arepreferably applied simultaneously. Use of the same electrodes togenerate components of both drive and transverse electric fieldsminimises the number of electrodes needed, as well as reducing the sizeof the device. In certain embodiments of the invention, additionalelectrodes may however be present, and not all of the electrodes in thespectrometer need be involved in generating a component of both thedrive and the transverse electric fields. The drive field is preferablya longitudinal electric field.

Preferably the drive electric field is a static electric field; that is,the field does not vary over time. However, a time-varying drive fieldcan be employed, for example, to adjust the width of the resolutionpeaks and thus configure an instrument for optimum performance in aparticular application. In some instruments the field may be swept anddata collected over a range of field strengths. In this way drive fieldstrength may be used as a further parameter for post-processing toachieve enhanced (more accurate) results. The field may be generated byapplication of a DC bias across the electrodes. It has been found that acontinuous, static electric field is sufficient to drive ions along theion channel while the transverse field separates the ions according tomobility, and hence parameters such as shape, mass and charge; thiscombination of fields removes the need for a drift gas flow.

The transverse electric field may vary over time, and may be generatedby application of an AC voltage across the electrodes. The AC voltage ispreferably asymmetric. Thus in preferred embodiments of the invention,the transverse electric field comprises an AC component and a DCcomponent. The DC component is preferably opposed to the AC component;that is, the AC component will tend to drive ions towards one side wallof the ion channel, while the DC component will tend to drive the ionstowards the other side wall of the channel. A DC ramp or sweep voltagemay also be added and parameters of the AC voltage such as amplitude,duty cycle and the like may also varied to obtain sweep and improvesensitivity and selectivity or other effects.

The electrode control means preferably allows any or all of the electricfields to be varied; this allows for the field to be tuned in order topermit detection of particular ions.

Preferably the electrodes are disposed adjacent the entrance and exit tothe ion channel. Alternatively the electrodes may be disposed within thechannel itself.

At least two electrode pairs may be provided; one electrode isconveniently situated at each corner of the channel. That is, fourelectrodes form four electrode pairs: two transverse pairs which serveto generate a transverse field, and two longitudinal pairs whichgenerate a drive field. Each electrode is a member of two pairs, onetransverse pair and one drive pair. The electrode pairs are transverselyseparated by the channel itself, while the pairs may be verticallyseparated by a resistive (eg 1-100KΩcm resistive silicon) semiconductingor insulating material to provide structural stability. Preferably fourelectrodes are provided at each ion channel.

The ionizer may comprise any convenient means; for example, a source ofionisinig radiation, a UV source, or the like.

The filter preferably comprises a plurality of ion channels, andconveniently more than 5, more than 10, more than 15, and more than 20ion channels. The channels may conveniently be defined by a plurality ofelectrode fingers forming a comb-like arrangement. In preferredembodiments, the filter comprises two or more interdigitated electrodearrays, each array having a plurality of electrode fingers. The presenceof multiple ion channels permits a relatively large ionisation volume tobe used adjacent the channels, thereby improving sensitivity of thespectrometer compared with conventional devices having a single ionchannel and hence restricted to a relatively small ionisation volume.

Preferably the ion channels are elongate; that is, they have arelatively short length (the direction along which ions will flow) and arelatively short width (in a minor transverse direction), with arelatively long depth (in a major transverse direction).

Optionally the interdigitated fingers may be curved, more particularlyserpentine, and in this way may then define curved or serpentinechannels. This has the advantage of reducing diffusion losses which,with straight electrodes, are caused by ions diffusing into the walls ofthe channels. With curved or serpentine electrodes these diffusionlosses are reduced (and the channel width in this sense is effectivelyincreased) because of the formation of a partial potential well within achannel. Curved or serpentine channels also reduce the deleteriouseffects of space charge repulsion.

Thus in another aspect the invention provides an ion filter havingchannels defined by electrodes with this general formation. Alsoprovided is an ion filter comprising two interdigitated electrodesforming a plurality of ion channels. Such an arrangement may be used asdescribed, or with a drift gas flow; the smaller gap size provided bythe interdigitated filter arrangement still provides advantages ofreduced voltages and hence simpler control electronics even when a driftgas flow is used.

The filter preferably comprises a resistive or semiconductive substrateon which is provided a conductive surface to form an electrode. Aconductive surface may be disposed on two faces of the substrate. Thesubstrate may comprise silicon. The conductive surface may comprisemetal, doped polysilicon or the like. In preferred embodiments, wherethe spectrometer is on a micro machined scale, the substrate and surfacemay conveniently be etched to form a desired shape and configuration,and to provide the ion channels, using conventional semiconductorprocessing techniques. This allows many channels to be formed inparallel, and on a small scale.

Preferably the length of the ion channel is less than the depth of thefilter, and preferably significantly less; for example, at least 10times less. In preferred embodiments, the filter has a generallywafer-like form, with the channel length being a fraction of the filterdepth. In some preferred embodiments, the channel length is less than1000 microns, less than 900 microns, and less than 800 microns, whilethe filter depth is more than 10,000 microns. Preferred channel lengthis from 1000 to 100 microns, more preferably from 800 to 300 microns,and most preferably from 500 to 300 microns.

Preferably also the width of the ion channel (that is, the gap spacingacross the channel over which the transverse electric field isgenerated) is less than the channel length. In preferred embodiments thegap spacing is between 10 and 100 microns. Such an arrangement allowsthe generation of relatively large electric fields across the channelwidth with relatively low voltages and power consumption. In preferredembodiments of the invention, the electric fields may be large enough tocause ion fragmentation or ion cracking. This allows large ion speciesto be fragmented into smaller species, which can improve detectorsensitivity and reduce the likelihood of interferents obscuring results.

The spectrometer preferably comprises means for heating the filter.Preferably the filter may be heated to at least 150° C. Heating thefilter can improve performance, and will assist in removing contaminantsfrom the filter. A separate heater may be provided (for example, asubstrate on which the filter is mounted), although preferably theheating means is integrated with the filter. In preferred embodiments,the filter comprises a substrate which is heated, for example by Jouleeffect heating when a voltage is applied across the substrate. If thesubstrate is integrated into the filter, then such a voltage will beapplied when the filter electrodes are actuated. The preferredmicroscale embodiments of the invention allow relatively low voltages tobe used to provide effective heating by the Joule effect.

The spectrometer conveniently comprises a plurality of functionallayers; each layer may have a wafer-like form. This arrangement isadvantageous in assembling a micro machined spectrometer since it allowsmass production (for example, batch or parallel manufacturing processes)semiconductor techniques to be used. The use of semiconductor techniquesgenerally means that manufacture will take place in a clean roomenvironment, such that lengthy decontamination and preparation steps arenot needed before the assembled product can be used. Such a spectrometerwill also be relatively compact due to the layer structure, which thusallows for greater miniaturisation than otherwise. For example, each ofthe ionizer, filter, and detector may comprise a functional layer. Incertain embodiments, it is possible to combine one or more functionallayers on a single physical wafer-like layer. For instance, the filterlayer and detector layer could be merged by using a silicon on insulator(SOI) wafer handle layer as the detector electrode and depositing theintegrated circuitry on the backside, or simply moving the controlelectronics out of the device. The ionizer could be integrated with aninlet layer by patterning a metallic radioisotope film on the undersideof the inlet slab. In one embodiment, the sensor could be composed ofjust two layers: all integrated filter and detector layer fabricated ina single SOI wafer, and a porous inlet cap with metal ionizationmaterial patterned on the underside. This embodiment would require justone bonding step.

In embodiments the channels are substantially perpendicular to a face ofthe filter. Preferably the filter has face area to channel length ratioof greater than 1:1 (mm), more preferably greater than 10:1 or 100:1(millimetres). For example a filter may have an 8 mm×8 mm face area anda channel length of approximately 200 μm.

The spectrometer may further comprise one or more of the followingadditional components; in preferred embodiments, each of these forms anadditional functional layer:

-   -   a) An inlet layer may be present, to prevent unwanted particles        from entering the spectrometer while permitting analytes to        diffuse into the device. The inlet layer is conveniently made        from a porous material, such as a porous ceramic.    -   b) A dehumidifier layer to deplete water vapour from the        spectrometer. This layer may comprise an absorbent material;        alternatively a desiccant or similar may be used. The layer may        further include a heating element, which may be used to purge        the absorbent material periodically.    -   c) A preconcentrator layer, to accumulate and periodically        release analyte to effectively concentrate the analyte. This        layer may also comprise an absorbent material, such as a        molecular sieve having pores of an appropriately large size to        absorb the desired range of analytes. A heating element may then        be activated to release absorbed analytes periodically.    -   d) A dopant layer comprising a material imprecated with a        desired chemical or dopant that is released or desorbed from the        layer and into the active region to affect chemical reactions        and therefore modify performance. This could be for example        ammonia to enhance atmospheric pressure ionization of certain        compounds or could be for example water, which is known to        enhance separation of compounds in the spectrum and therefore        resolution.

The detector may comprise an electrode located on a substrate.Conveniently the detector is a wafer-like semiconductor substrate; forexample, silicon. The detector may further comprise control circuitryand the like; this is conveniently formed on the semiconductorsubstrate. The detector may further comprise connectors for connectingthe control circuitry and/or the electrode to a processor means or thelike for monitoring the electrode or controlling the device.

The spectrometer may also comprise means for generating a gascounterflow through the filter against the direction of movement ofions. Rarely will all of a sample be ionised, such that intact moleculesor partial ionisation products may enter the filter. Such molecules inthe filter region may lead to further reactions and interactions, whichcause deleterious effects such as peak shifting etc. The use of a gascounterflow can assist in removing contaminants from the filter, or inmaintaining an unreactive environment within the filter. The gas usedmay be unreactive—for example, nitrogen or helium—or may be selected toaffect affinity of contaminants to ionisation—for example, ammonia, DCMetc may be used. A gas counterflow can also be used to alter mobility ofions within the filter. The gas counterflow may be at a very low flowrate; for example, a minimal pressure difference between sides of thefilter is generally sufficient, since the flow is not needed to moveions (unlike gas flows in conventional ion spectrometers). Thusminiaturised pumps or diaphragms may be used, with relatively low powerconsumption; or a pressurised gas reservoir may be used.

According to a further aspect of the invention, there is provided amethod of analysing a sample, the method comprising the steps of:

-   -   providing a first drive electric field along the length of an        ion channel;    -   providing a second transverse electric field orthogonal to the        first;    -   ionising a sample to generate ions adjacent an entrance to the        ion channel; and    -   detecting generated ions which have passed through the ion        channel.

Preferably the drive electric field is a static electric field; that is,the field does not vary over time. However a time-varying field can alsobe employed, as previously mentioned. The field may be generated byapplication of a DC bias across the electrodes.

The transverse electric field may vary over time, and may be generatedby application of an AC voltage across the electrodes. In preferredembodiments of the invention, the transverse electric field comprises anAC component and a DC component. The DC component is preferably opposedto the AC component; that is, the AC component will tend to drive ionstowards one side wall of the ion channel, while the DC component willtend to drive the ions towards the other side wall of the channel.Parameters may be varied as previously described.

The drive and transverse electric fields are preferably providedsimultaneously. Preferably the drive and transverse electric fields aregenerated by a plurality of electrodes, each electrode contributing acomponent of both the drive and the transverse electric fields.

The method may also comprise the step of applying a counterflow of gasacross the filter opposed to the direction of motion of the ions.

The method may further comprise the step of fragmenting ions byapplication of a sufficiently large electric field across the ionchannel.

The ion channel may be heated, for example by applying sufficientvoltage across a substrate to generate Joule heating.

According to a further aspect of the present invention, there isprovided an ion filter for use in a spectrometer such as an ion mobilityspectrometer, the filter defining at least one ion channel along whichions may pass, and a plurality of electrodes disposed proximate the ionchannel, the electrodes being configured to allow generation of a firstdrive electric field along the length of the ion channel, and generationof a second transverse electric field orthogonal to the first, whereineach of said plurality of electrodes is involved in generating acomponent of both the drive and the transverse electric fields.

At least two electrode pairs may be provided; one electrode isconveniently situated at each corner of the channel. The electrode pairsare transversely separated by the channel itself, while the pairs may bevertically separated by an insulating material to provide structuralstability. Preferably four electrodes are provided at each ion channel.

The filter preferably comprises a plurality of ion channels, andconveniently more than 5, more than 10, more than 15, and more than 20ion channels. The channels may conveniently be defined by a plurality ofelectrode fingers forming a comb-like arrangement. In preferredembodiments, the filter comprises two or more interdigitated electrodearrays, each array having a plurality of electrode fingers, optionallycurved as previously described.

Preferably the ion channels are elongate; that is, they have arelatively short length (the direction along which ions will flow) and arelatively short width (in a minor transverse direction), with arelatively long depth (in a major transverse direction).

The filter preferably comprises a resistive substrate on which isdisposed a conductive surface to form an electrode. A conductive surfacemay be disposed on two faces of the resistive substrate. The substratemay comprise silicon. The conductive surface may comprise metal,polysilicon or the like. In preferred embodiments, where thespectrometer is on a micro machined scale, the substrate and surface mayconveniently be etched to form a desired shape and configuration, and toprovide the ion channels, using conventional semiconductor processingtechniques. This allows many channels to be formed in parallel, and on asmall scale.

Preferably the length of the ion channel is less than the depth of thefilter, and preferably significantly less; for example, at least 10times less. In some preferred embodiments, the filter has a generallywafer-like form, with the channel length being a fraction of the filterdepth. In a particularly preferred embodiment, the channel length isless than 1000 microns, less than 900 microns, and less than 800microns, while the filter depth is more than 10,000 microns. Preferredchannel lengths are from 1000 to 100 microns, more preferably 800 to 300microns, and most preferably 500 to 300 microns.

According to a further aspect of the present invention, there isprovided an ion mobility spectrometer comprising an ionizer, an ionfilter, and an ion detector;

-   -   wherein the ion filter defines a plurality of ion channels along        which ions may pass from the ionizer to the ion detector; and    -   wherein the ion filter comprises a plurality of electrodes        disposed proximate the ion channel;    -   the spectrometer further comprising electrode control means for        controlling the electrodes such that a first drive electric        field is generated along the length of the ion channel, and a        second transverse electric field is generated orthogonal to the        first.

The invention also provides an ion filter for use in a spectrometer suchas an ion mobility spectrometer, the filter defining a plurality of ionchannels along which ions may pass, and a plurality of electrodesdisposed proximate the ion channel, the electrodes being configured toallow generation of a first drive electric field along the length of theion channel, and generation of a second transverse electric fieldorthogonal to the first.

According to a still further aspect of the present invention, there isprovided a method of manufacturing an ion mobility spectrometer, themethod comprising the steps of:

-   -   providing a generally planar resistive substrate having a        conductive layer provided on two faces thereof;    -   patterning, for example etching the substrate to provide a        filter comprising two or more interdigitated electrode arrays        defining a plurality of ion channels having electrodes disposed        proximate said channels;    -   bonding said filter on one face to a generally planar ion        detector layer comprising a detector electrode; and    -   attaching, for example bonding said filter on the opposed face        to a generally planar ionisation layer comprising means for        ionising an analyte.

Preferably the method further comprises the step of providing electrodecontrol means for controlling the electrodes such that a first driveelectric field is generated along the length of the ion channel, and asecond transverse electric field is generated orthogonal to the first.

BRIEF DESCRIPTION OF THE DRAWINGS

These and other aspects of the present invention will now be describedby way of example only with reference to the accompanying Figures, inwhich:

FIG. 1 is a schematic of a conventional FAIMS filter structure;

FIG. 2 is a schematic of a FAIMS filter structure as may be used with aspectrometer in accordance with embodiments of the present invention;

FIG. 3 is a perspective view of a spectrometer in accordance with anembodiment of the present invention;

FIG. 4 is an exploded perspective view of the spectrometer of FIG. 3;

FIG. 5 is a perspective view of the inlet layer of the spectrometer ofFIG. 3;

FIG. 6 is a perspective view of the dehumidifier layer of thespectrometer of FIG. 3;

FIG. 7 is a perspective view of the preconcentrator layer of thespectrometer of FIG. 3;

FIG. 8 is a perspective view of the ionizer layer of the spectrometer ofFIG. 3;

FIG. 9 is a perspective view of the filter layer of the spectrometer ofFIG. 3;

FIG. 10 is a perspective view of the detector layer of the spectrometerof FIG. 3;

FIG. 11 is a graph showing the response of a spectrometer according tothe invention as sample flow is varied;

FIG. 12 is a graph showing the response of a spectrometer according tothe invention to acetone as an analyte;

FIG. 13 is an electron micrograph of a portion of an ion filter inaccordance with an embodiment of the present invention, illustrating thefilter structure;

FIG. 14 shows the use of a heated membrane inlet tube with the presentinvention;

FIG. 15 shows the use of an inlet tube to sample fluids with the presentinvention;

FIG. 16 shows the incorporation of a standard into the presentinvention;

FIG. 17 shows a detector electrode array as may be used with the presentinvention;

FIG. 18 shows a switched integrator which may be used with theinvention; and

FIG. 19 shows an example of a filter structure formed from stackedplanar layers.

DETAILED DESCRIPTION OF THE DRAWINGS

FIG. 1 shows in a schematic form the operation of conventional FAIMS(field asymmetric ion mobility spectroscopy). Air is drawn atatmospheric pressure into a reaction region where the constituents ofthe sample are ionized. The ions 12 a, 12 b are blown between two metalelectrodes 14 a, 14 b, one with a low-voltage DC bias and the other witha periodic high-voltage pulse waveform, to a detector plate (not shown)where they collide and a current is registered. Ions are quickly driventoward one electrode during the pulse phase and slowly driven toward theopposite electrode between pulses. Some ions 12 a impact an electrodebefore reaching the detector plate; other ions 12 b with the appropriatedifferential mobility reach the end, making this a differential mobilityion filter. A plot of the current generated versus DC bias provides acharacteristic differential ion mobility spectrum. The intensity of thepeaks in the spectrum, which corresponds to the amount of charge,indicates the relative concentration of the agent.

A schematic diagram of the operation of the filter of the presentinvention is shown in FIGS. 2 a and 2 b. This design is intended toovercome or to reduce scaling limitations. Our approach centres on aninnovative electrode geometry affording low voltage operation. Aninterdigitated electrode structure is formed by etching a dense array ofnarrow channels through high resistivity silicon. Ions are driventhrough the channels via a novel transport mechanism relying on electricfields instead of moving gas flows to achieve pumpless operation. Ionchannels 22 are defined by the silicon substrate 24 which carries aconductive layer 26, defining electrodes at each corner of the entranceto and exit from the ion channel. The amplifiers 28 depicted representanalogue adders. Note that the metal plates are replaced by highresistivity silicon. In addition to the high-voltage pulse and lowvoltage DC bias generated across the channel, a further DC source 30creates a drive electric field to drive ions through the channel,eliminating the need for a moving gas flow. A theoretical analysis hasshown that ions can be propelled fast enough to avoid ion loss intochannel walls due to diffusion. FIG. 2 a shows a preferred embodimenthaving multiple ion channels, while FIG. 2 b illustrates a single ionchannel for clarity, together with the controlling electronics. Thefilter is typically operated with an electric field of 40 to 200 Vacross the channel, with the high-voltage pulse being typically from 3MHz to 10 or 20 MHz. The drive field may generally be from 10 to 40 V.

FIG. 3 shows a perspective view of the sensor of the present invention.The sensor is formed from a number of separate layers bonded together,as will be described. The ion channels are oriented vertically so thation movement is directed perpendicular to the silicon substrate surface.This geometry permits subsystems to be segregated to separate waferlayers that are stacked and bonded in the order of ion flow, producing afully integrated gas sensor with the smallest possible size.

An exploded perspective view of the sensor is shown in FIG. 4. Thespectrometer includes a number of layers in addition to the filterlayer, From top to bottom, these layers are: an inlet layer 50,dehumidifier layer 60, preconcentrator layer 70, ionizer layer 80,filter layer 90, and detector layer 100.

This is only one embodiment envisioned and could be greatly simplifiedor otherwise modified in a variety of ways. For instance, the filterlayer and detector layer could be merged by using the silicon oninsulator (SOI) wafer handle layer as the detector electrode anddepositing the integrated circuitry on the backside, or simply movingthe control electronics out of the device. The dehumidifier andpreconcentrator layers could be integrated together on the same layer,or moved outside of the device and into the cavity housing the sensor.The ionizer could be integrated with the inlet layer by patterning ametallic radioisotope film on the underside of the inlet slab. In thesimplest case, the sensor could be composed of just two layers: anintegrated filter and detector layer fabricated in a single SOI wafer,and a porous inlet cap with metal ionization material patterned on theunderside. This embodiment would require just one bonding step.

Our concept excels by harnessing small size properties for improvedperformance. The microstructured filter layer uses low voltages andimplements a novel method of analyte transport, which eliminates theneed for moving gas flows and allows pumpless operation. Microscalethermal isolation facilitates low power operation of a fast microscalepreconcentrator. A closely integrated detector improves sensitivity. Thesmall size of the sensor cavity allows a simple approach for removingperformance degrading humidity. The batch fabrication advantages of ourmicro-electro-mechanical-system (MEMS) implementation make it wellsuited for ubiquitous deployment scenarios.

Construction

The completed sensor is formed by bonding separate subsystem layerstogether as shown in FIG. 4. This construction allows each subsystem tobe fabricated on an independent wafer for simplified development andease of production. Details of the function and fabrication of eachsubsystem layer is given below. The layers are electricallyinterconnected using through-chip vias or simple wire-bonding.

FIG. 5: Inlet Layer

Function: The function of this layer is to prevent particles fromentering the detector while permitting analytes to diffuse through tothe analysis region.

Construction: This layer is made of a micro-porous medium (such asceramic) with a pore size small enough to prevent particulates frompassing through. It has a simple planar construction as shown.

Fabrication: The micro-porous medium is received as appropriately sizedwafers requiring no further fabrication. It is simply bonded to the topof the sensor wafer stack.

FIG. 6: Dehumidifier Layer

Function: The function of this layer in to control the humidity of thesensor cavity. Water vapour affects separation of compounds in FAIMS,and although it can help to increase resolution if it is not controlledit can add uncertainty to the measurements that leads to poorperformance. Humidity control is achieved by removing the water vapouror drying the sensor cavity. Drying is accomplished using a materialthat selectively removes humidity at the sensor entrance before it canenter the analysis region. This material is periodically heated to purgeabsorbed moisture.

Construction: A special absorbent film 62 covers a micro hot plate 64suspended along the top surface of this section. The micro hot plateconsists of a meandering polysilicon wire deposited onto a siliconnitride membrane 66. The components are all formed on a siliconsubstrate 68. The absorbent film contains a molecular sieve compoundwith pores 3 Å across or less. The pores are just large enough to absorbwater molecules but too small to absorb analyte compounds.

Fabrication: Polysilicon and silicon nitride depositions are performedand lithography is used to pattern the micro hot plate. Alternatively, acommercial CMOS process is used. An absorbent film is then deposited ontop and an etch release is employed to suspended the structure.

FIG. 7: Preconcentrator Layer

Function: The function of this layer is to concentrate the analyte foranalysis. This is accomplished using a molecular sieve material 72 likethat used in the dehumidifier layer, but which is less selective. It isheated to release a concentrated analyte plume during the analysisperiod.

Construction: A special absorbent film 72 covers a micro hot plate 74suspended along the top surface of this section. The micro hot plateconsists of a meandering polysilicon wire deposited onto a siliconnitride membrane 76. The absorbent film contains a molecular sievecompound with a large pore size, which is selected so that all of thedesired analytes are absorbed.

Fabrication: Polysilicon and silicon nitride depositions are performedand lithography is used to pattern the micro hot plate. Alternatively, acommercial CMOS process is used. An absorbent film is then deposited ontop and an etch release is employed to suspended the structure.

FIG. 8: Ionizer Layer

Function: The function of the ionization layer is to ionize the analyte.A radioisotope is initially used for this purpose, but an ultravioletlight emitting diode (UV-LED) may be an alternative. UV-LEDs arepotentially more selective, but suitable versions are not yet available.Irradiation is confined completely within the ionization assembly sothat no ionization occurs within the filter region, which would degradesensor performance.

Construction: This layer is essentially a hollow cavity in whichionization takes place. An UV-LED or radioactive foil 82 is attached toprovide the ionization stimulus. UW-LEDs are more desirable, as they aresafer to process, are potentially more selective, can be cycled off, andraise less alarm among the public. Radioactive sources consume no powerand can be safe. Unfortunately, suitable UV-LEDs are not yet available,but significant progress is being made toward developing them. Anacceptable ultraviolet source should emit wavelengths shorter than 280nm.

Fabrication: A silicon nitride membrane 84 is deposited and a metal seedlayer is deposited on top. Openings are patterned through both. Theradiation source 82 is then electroplated onto the seed layer. Finally,a bulk etch is performed to make the cavity.

FIG. 9: Filter Layer

Function: The function of the filter layer is to admit selected ionicspecies to the detector and neutralize all unselected species. This isaccomplished by introducing the ionized analyte into an array ofmicrochannels 92 where two orthogonal electric fields act simultaneouslyon it. A drive electrostatic field is applied to propel ions quicklythrough the filter region before they have time to diffuse into themicrochannel walls. A transverse oscillating electric field is appliedto select species with a particular ratio of high field mobility to lowfield mobility.

Construction: This layer consists of a pair of interdigitated electrodes94 a, 94 b slightly spaced apart. The electrodes are fabricated out ofhigh resistivity silicon 96 with features a few microns wide and severalhundred microns deep, creating many (typically tens to hundreds) highaspect ratio channels 92 in which the filter action takes place. Most ofthe volume occupied by the filter layer is open space. The largecombined aperture of the channels means that ions can be efficientlycoupled into the filter region so that ion throughput, and hence devicesensitivity, can be made very high. The narrow channel width means thatthe voltages needed to create transverse fields are very small,typically tens of volts, since voltage scales with gap distance. Highresistivity silicon is used so that the electrodes act as resistors.Currents passing from top to bottom through each electrode generate thedrive electrostatic field used to drive ions through the structure.

Fabrication: The filter layer is fabricated using largely conventionalmicronmachining techniques. Silicon on insulator (SOI) wafers are custommade with a high resistivity device layer specially doped on both sidesto form the thin conductive electrode surfaces 96 and facilitate ohmiccontacts 98. Deep reactive ion etching (DRIE) is used to create the highaspect ratio features. Calculations show that a 20:1 aspect ratio issufficient; other aspect ratios may of course be used, for example 10:1or greater than 20:1. A back etch and then an oxide etch release areperformed to open the channels and provide access to covered electrodesurfaces.

The filter structure can be manufactured by a range of conventionalmicrofabrication techniques. One representative process involves thefollowing steps. The substrate used is a high resistivity silicon wafer.Aluminium is deposited on tie top and bottom faces of the wafer,followed by a photo resistant coating on each face. The top face ismasked and subjected to photolithography, after which the aluminiumcoating of the top face is wet etched to provide an array of electrodes.The photoresist is stripped from both faces, and the process repeated toform the bottom face electrodes. A further resist coating is applied tothe top face, after which the silicon is etched from the lower faceusing deep reactive ion etching to form channels. The photoresist isstripped for the final time, and the filter is ready for furtherprocessing.

In a variation of this technique, the silicon wafer may be initiallybonded on the bottom face to a glass substrate; the various etchingsteps are then carried out from the top face to create channels andelectrodes, after which the glass substrate is acid etched to expose thebottom face of the wafer, leaving a glass support in contact with thewafer. Other variations may include the use of substrates other thanglass; and performing the steps listed in a different order.

FIG. 13 shows an electron micrograph of a portion of a filter structureof the present invention.

FIG. 10: Detector Layer

Function: The functions of the detector layer are to generate thesignals that drive the ion filter layer, collect and measure the currentof filtered ion species, and output spectrometry data calculated bycorrelating detected current with drive signals,

Construction: All system circuitry 102 is included in this layer,namely: filter electrode drivers, detector transimpedance amplifier,data converters, and control logic. The circuitry is protected by anoxide layer 106 and the ion collector electrode 104 is exposed on top.To provide better passivation, an intermediate metal layer 108 may beadded to guard the collector electrode from leakage currents. Vias fromthe circuitry to solder pads 110 on the bottom of the substrate providefor flip-chip mounting. Multiple detector channels may be employed todecrease analysis time. This scheme requires that the filter electrodeand associated circuitry be replicated in parallel.

Fabrication: All circuitry and electrodes are fabricated using acommercial mixed-signal BiCMOS process capable of the voltages required.The delivered wafer is post-processed using DRIE and metallization stepsto form vias between the circuitry and backside and is then solderbumped.

In certain embodiments the detector electrode may be integrated into thefilter layer; for example, by bonding or fabricating the filter layer ona substrate which acts as a detector electrode.

Control and Analysis Algorithms

Because the filter layer electrodes are controlled using low voltagesand conventional integrated circuitry, the electric field strengthwithin the filter region can be controlled more precisely and in morecomplicated ways than possible with conventional designs. Thedifferential mobility can thus be determined more precisely and, hence,the resolution is expected to improve due to this precision. Morecomplicated control and analysis algorithms may allow lower false alarmrates by sampling analyte ion mobilities at multiple field strengths,instead of at just two points, as is the case with existing FAIMSdesigns.

The assembled spectrometer may be connected to a processor means, suchas a computer or the like, which may be used to control the spectrometerand to monitor data.

A sample device was constructed as described, and used to monitor a testsample of acetone. FIG. 11 is a graph indicating the varying response ofthe device as the flow of acetone over the device is increased. FIG. 12shows the shift in response from the device as acetone is introducedinto the device, indicating that a sensitive response can be obtained.

Embodiments of spectrometers in accordance with the present inventionmay have a number of benefits of the design compared with conventionalspectrometers. These include:

-   -   a) Tight integration and small sensor size. The end product is a        fully integrated monolithic sensor which can be produced with a        footprint under one square centimetre and a volume less than one        cubic centimetre. Its miniature size can be expected to make        many new applications and deployment scenarios possible, and its        monolithic construction will make it resilient against high        forces.    -   b) Simplified system design, modification, fabrication, and        verification. The present approach slices the three dimensional        sensor into separate two dimensional layers. These layers are        designed independently and in parallel. They can be fabricated        using existing micromachining processes and easily tested using        conventional wafer probe equipment.    -   c) Reduces or eliminates need for additional packaging and        assembly. Because subsections are connected in a gas tight        manner by wafer bonding, little or no external packaging is        required. The pumpless design eliminates the need for        post-fabrication assembly with an external pump. MEMS packaging        can be a significant component of total device cost. Designs        with simplified packaging requirements are thus favourable.    -   d) Flip-chip implementation. Ions are drawn in through the top        and directed to the detector at the bottom. Because the detector        layer includes all circuitry and is the very bottom layer,        through-chip vias can connect the circuitry with solder pads on        the back side to form a flip-chip device. A flip-chip connection        scheme requires the smallest board real estate for mounting,        offers the lowest possible weight, and has the most reliable        interconnects.    -   e) Manufactured using conventional microfabrication technology.        Only standard micromachining techniques, such as DRIE of SOI,        are required. Thus, minimum process development is required,        base materials are readily available in volume at economical        prices, and fabs capable of commercial production already exist.

In certain embodiments of the invention, the spectrometer may furthercomprise a membrane, and in particular a semi-permeable membrane. Forexample, the membrane may be made from expanded PTFE (such as that soldunder the name GORE-TEX (RTM)), or from dimethlylsilicone. Suchsemi-permeable membranes may find many uses in the invention.

The inlet of the spectrometer may be covered by a membrane. This has anumber of functions; one is to prevent dust and particulates fromentering the device, while the semi-permeable membrane still permitsgaseous analytes to enter. The membrane may exclude polar molecules fromthe active region of the spectrometer; excessive polar molecules canlead to clustering which reduces resolution of the device and affectsthe data. The membrane serves to concentrate analytes in the regionimmediately adjacent the sensor, so improving sensitivity. Further,liquids may be passed over the membrane, such that the analyte candiffuse from the liquid into the device in gas phase, thereby permittinganalysis of liquid samples. The membrane may incorporate a heatingelement; varying the temperature of the membrane can affect diffusionprocesses across the membrane so allowing additional selectivity.

Selection of appropriate membrane material may also be used to excludeparticular molecular species from the device.

A membrane may also be used as a pre-concentrator; particularly if themembrane also incorporates a heating element. Analytes may diffuse intothe membrane where they will be held until the temperature is raised;this releases a relatively high concentration of analyte into thedevice. The membrane may simply cover the inlet of the spectrometer, butin preferred embodiments may take the form of an inlet tube leading tothe device; sample may be continuously passed along the tube giving somesample data over time, while a concentrated plug of analyte may bereleased when desired from the inlet tube. For sampling liquids, aninlet tube may be immersed in the sample, allowing analyte to diffusefrom the liquid into the membrane. Heating of the membrane releasesanalyte into the spectrometer. Examples of these are shown in FIGS. 14and 15.

A separate membrane may also be used as a sample introduction device. APDMS (polydimethylsilicone) membrane (or other suitable material)containing an embedded silicon wafer can be introduced into a liquid orgaseous sample. Analyte from the sample is adsorbed into the membrane.The sample introduction device is then located adjacent thespectrometer, and a current passed through the silicon wafer, serving toheat the wafer and hence the membrane. Adsorbed analyte is then desorbedadjacent the spectrometer. This arrangement allows sampling to takeplace at a location remote from the spectrometer. The sampling devicemay be connectable to the electronics of the spectrometer to permitcurrent to be passed through the silicon wafer.

Various membrane-related devices may be used to incorporate standardsinto the spectrometer. The use of standards can allow calibration of thespectrometer response, and in some circumstances can also correct fortemperature or humidity variations. A membrane standard will releaseanalyte at a generally constant rate dependent largely on the physicalproperties of the membrane chosen, rather than on the concentration ofthe standard itself. Such standards are therefore relatively simple tomanufactures robust, and can be recharged without requiring accuraterecalibration. Loading of the membrane standards may be achieved innumerous ways. For solids, the standards may be introduced during themembrane curing process. For liquids or gases the membrane may be usedto enclose a sample of the standard; and for gases the membrane can beimpregnated and stored in a controlled headspace. The membrane standardmay be a separate component from the spectrometer, or may beincorporated internally into the spectrometer to allow readycalibration; for example, a standard may be connected to an inlet pipeleading to the spectrometer; this is illustrated in FIG. 16. An internalstandard may also be used for continual monitoring and validation ofsampling data. The standards used will depend on the particularapplication, but preferred standards will have a high proton/electronaffinity or can donate protons/electrons; can be separated from targetcompounds; and will not be masked by naturally occurring interferents.

Multiple filters and/or detectors may be combined in a detector array toimprove sensitivity to a range of analytes. With a single filter, it isnecessary to sweep the compensation voltage to tune the filter totransmit certain ion species; for a large proportion of the time thecompensation voltage may not be tuned to the analyte of interest, andthere is a delay time as the voltage is swept. Combination of severalfilters and/or detectors allows each filter to remain tuned to a singlevoltage to detect a specific analyte of interest, while the array formatallows detection of a range of different analytes. The output from thesensor array would be a discrete spectrum with a number of channels,corresponding to the number of analytes of interest. It is also possibleto have several filters tuned to tie same voltage but with differentdopant chemistries in each device to improve screening and reduceinterference effects; or even several identical filters for redundancy.

Further improvements in sensitivity can be achieved by using multipledetector electrodes with a single filter. When a single detectorelectrode is used, this is a single plate which measures the total ioncurrent which may contain several ion types, while only a single typemay be of interest. A series of discrete detector electrodes may beused, orthogonal to the exit path taken by the ions as they leave thefilter; this creates all orthogonal field drawing the ions toward thedetectors. The speed at which the ions move toward the electrodes isdependent upon the mobility of the ion; and as there is still a linearcomponent to the electric field, ions of differing mobilities willstrike different detector electrodes. This permits greater sensitivityin detecting different ion species which pass the filter. An exampledetector electrode array is shown in FIG. 17.

Another means whereby detector sensitivity may be improved is bycoupling the detector electrode to a capacitor which gradually builds upcharge as individual ions strike the detector plate. Periodic dischargeof the capacitor allows the ion contributions to be summed over time,thereby increasing sensitivity and signal to noise ratio of the device.

A switched integrator may also or instead be used to improve sensitivityin certain circumstances. The ion detector is connected by a switch toan integrator; this is switched to measure output voltage, and a secondswitch is cycled to reset the device. An example of a switchedintegrator is shown in FIG. 18.

In certain embodiments, the spectrometer of the present invention may beoperated in a switch mode for detection; that is, the detector isactivated periodically to take a sample at regular intervals. Thisoperating mode may be used to moderate power consumption and to prolongoperating life of the device. This is particularly of benefit when adevice is intended to be used for prolonged monitoring of a sample; forexample, in security applications or the like.

Operation of the spectrometer could also include varying the temperatureand/or pressure at which the device is run, to vary the performance ofthe device.

Although the invention thus far has been described in terms of usingonly an electric field to drive ions through the filter, it will beapparent that it is possible to use the filter in combination with a gasflow, either a counterflow as previously described, or as a flow in thesame direction as the ion flow driven by the electric field.

A gas flow may be used in embodiments solely for introduction of ionsinto the spectrometer, while the electric field operates once the ionshave entered the device.

Alternatively, the filter may be operated with only a transverseelectric field to selectively admit ions; longitudinal movement of theions is controlled purely by a longitudinal gas flow.

In some embodiments of the invention, the filter structure may befabricated as completely solid metal elements, for operating in gas flowmode, or as a metal coated silicon or other wafer structure. Metalcoating may be formed by, for example, sputtering, evaporation,electroplating, electroless electroplating, atomic layer deposition, orchemical vapour deposition. A solid metal device may be produced bywater cutting, laser cutting, machining, milling, or LIGA. Although thisarrangement does not have the advantages of a purely electric fielddriven device, the ability to make use of a miniaturised filter with agas flow propulsion has advantages such as reducing the operatingvoltage. Use of an interdigitated array of ion channels compensates tosome extent for the lower voltage used.

As mentioned above, gas flow may be used to couple ions into thespectrometer. An alternative introduction method is to use electrosprayionisation. An analyte dissolved in solvent is forced through acapillary thin needle point which is charged. This induces a charge onthe expelled droplets which are accelerated towards an oppositelycharged pinhole orifice. This allows the use of a non-radioactiveionizer, as well as permitting liquid phase ionisation without heating,which could degrade some analytes, and also permits the ionisation ofsome macromolecules such as peptides.

While the filter structure of the present invention has been describedprimarily ill terms of having a wafer structure, it will be apparentthat suitable filter structures may be made from multiple stacked planarlayers, to provide a filter having much longer ion channels than thoseof a wafer structure. Alternate layers of the stack may be electricallyconnected in parallel. While a wafer structure is particularly suited tomicroscale manufacture, a stacked planar arrangement may be achievedusing macro scale components, such as metal coated ceramic layers, aswell as microscale such as using the EFAB process. Due to the increasein length of ion channels in this embodiment, it is preferable that thisembodiment of the invention operates with a combination of gas flow andelectric field to drive ions through the channels. A schematicillustration of this filter structure is shown in FIG. 19.

The filter structure of the present invention may be drivendifferentially; that is, the AC component of the transverse field may beapplied to opposing sides of the ion channel out of phase.

The ion channel may further comprise inert conductive particles locatedon the walls thereof; these may be nanoparticles, for example goldnanoparticles. Where the ion channel comprises silicon, over time someoxidation of the surface will occur, altering the electrical propertiesof the device. The inert particles will not be subject to oxidation, andso will provide a conductive surface for ion contact despite oxidationof the surface of the channel.

The spectrometer of the present invention may be coupled to one or moreother detection or analysis devices; or the spectrometer may be operatedin combination with one or more other analysis techniques. Thespectrometer may receive analytes from such a device, or may transferanalytes to said device. Representative additional detection or analysistechniques include mass spectroscopy, gas chromatography, ion mobilityspectroscopy, liquid chromatography, capillary electrophoresis, flameionization detection, thermal conductivity detection, and solid phasemicroextraction. Any or all of these may be combined with the presentinvention, and spectrometers of the present invention may also becombined with other spectrometers according to tie invention.

Two representative uses of spectrometers of the present inventioninclude drug breath analysis, and quality control of wine. For drugbreath analysis, the device may be used to detect volatile metabolitesoriginating from the use of a controlled substance in the exhalations ofa subject. This would be much quicker and simpler than existing analysistechniques which generally rely on hair, blood, or urine analysis. Themetabolites to be detected depend on the substance to be screened for.

Wine is susceptible to taint or corking which impairs the taste andquality of the drink. Corked wine includes a number of contaminants suchas tri- and tetra-chloroanisoles, and tri- and tetra-chlorophenols.Spectrometers of the present invention may be used to detect thesecompounds. In some embodiments, a spectrometer may be integrated into acork-shaped housing intended to sit within the neck of a standard winebottle, allowing for ready testing of wine samples. A simple red orgreen light alert may be incorporated into the device to allow rapidreading of results. Alternatively, the device may be incorporated into awine bottling production line to ensure quality control of the bottling.The device may also be used to sample air drawn over corks beforebottling occurs, to check for contaminants in the corks themselves.

1. An ion mobility spectrometer comprising an ionizer, an ion Filter,and an ion detector; wherein the ion filler defines at least one ionchannel along which ions may pass from the ionizer to the ion detector;and wherein the ion filter comprises a plurality of electrodes disposedproximate the ion channel; the spectrometer further comprising electrodecontrol means for controlling the electrodes such that a first driveelectric field is generated along the length of the ion channel, and asecond transverse electric field is generated orthogonal to the first,and wherein each of said plurality of electrodes is involved ingenerating a component of both the drive and transverse electric fields.2. The spectrometer of claim 1, wherein the drive electric field is astatic electric field.
 3. The spectrometer of claim 1, wherein thetransverse electric field varies over time.
 4. The spectrometer of claim3, wherein the transverse electric field comprises an AC component and aDC component.
 5. The spectrometer of claim 1, wherein the electrodes aredisposed adjacent the entrance and exit to the ion channel.
 6. Thespectrometer of claim 1, wherein at least two electrode pairs areprovided.
 7. The spectrometer of claim 1, wherein the filter comprises aplurality of ion channels.
 8. The spectrometer of claim 7, wherein theion channels are defined by a plurality of electrode fingers forming acomb-like arrangement.
 9. The spectrometer of claim 1, wherein thefilter comprises two or more interdigitated electrode arrays, each arrayhaving a plurality of electrode fingers.
 10. The spectrometer of claim1, wherein the filter has a generally wafer-like form.
 11. Thespectrometer of claim 1, wherein the spectrometer comprises a pluralityof functional layers, each layer having a wafer-like form.
 12. Thespectrometer of claim 1, further comprising one or more of an inletlayer, a dehumidifier layer, and a preconcentrator layer.
 13. Thespectrometer of claim 1, further comprising a semipermeable membrane.14. The spectrometer of claim 13 wherein the membrane comprises aheating element.
 15. The spectrometer of claim 13 wherein the membraneis in the form of an inlet tube.
 16. The spectrometer of claim 1comprising a standard.
 17. The spectrometer of claim 1 comprisingmultiple ion filters.
 18. The spectrometer of claim 1 comprisingmultiple ion detectors.
 19. The spectrometer of claim 1 furthercomprising means for generating a gas flow through the spectrometer. 20.The spectrometer of claim 19 wherein the gas flow is a counterflowagainst the direction of movement of ions.
 21. The spectrometer of claim1 further comprising means for heating the filter.
 22. The spectrometerof claim 21 wherein the healing means comprises a substrate which isheated by Joule effect heating.
 23. The spectrometer of claim 1 whereinthe ion channel includes inert conductive particles located on the wallsof the channel along its length.
 24. The spectrometer of claim 1 whereinthe ion filter comprises a wafer-like form.
 25. The spectrometer ofclaim 1 wherein the ion filter comprises a plurality of stacked planarlayers.
 26. The spectrometer of claim 1 wherein the ion channel iscurved or serpentine.
 27. A spectrometer according to claim 1 whencoupled to one or more other detection or analysis devices.
 28. Thespectrometer of claim 1 further comprising control means for operatingthe spectrometer periodically to sample at intervals.
 29. Thespectrometer of claim 1 wherein the ion detector comprises an electrodecoupled to a capacitor which is periodically discharged.
 30. A method ofanalyzing a sample, the method comprising the steps of: providing afirst drive electric field along the length of an ion channel; providinga second transverse electric field orthogonal to the first; ionizing asample to generate ions adjacent an entrance to the ion channel; anddetecting generated ions which have passed through the ion channel. 31.The method of claim 30, wherein the drive and transverse electric fieldsare generated by a plurality of electrodes, each electrode contributinga component of both the drive and the transverse electric fields. 32.The method of claim 30, wherein the drive electric field is a staticelectric field.
 33. The method of claim 30, wherein the transverseelectric field varies over time.
 34. The method of claim 30 furthercomprising periodically repeating the steps to sample at intervals. 35.An ion filter for use in a spectrometer such as an ion mobilityspectrometer, the filter defining at least one ion channel along whichions may pass, and a plurality of electrodes disposed proximate the ionchannel, the electrodes being configured to allow generation of a firstdrive electric field along the length of the ion channel, and generationof a second transverse electric field orthogonal to the first, whereineach of said plurality of electrodes is involved in generating acomponent of both the drive and the transverse electric fields.
 36. Anion mobility spectrometer comprising an ionizer, an ion filter, and anion detector; wherein the ion filter defines a plurality of ion channelsalong which ions may pass from the ionizer to the ion detector; andwherein the ion filter comprises a plurality of electrodes disposedproximate the ion channel; the spectrometer further comprising electrodecontrol means for controlling the electrodes such that a first driveelectric field is generated along the length of the ion channel, and asecond transverse electric field is generated orthogonal to the first.37. An ion filter for use in a spectrometer such as an ion mobilityspectrometer, the filter defining a plurality of ion channels alongwhich ions may pass, and a plurality of electrodes disposed proximatethe ion channel, the electrodes being configured to allow generation ofa first drive electric field along the length of the ion channel, andgeneration of a second transverse electric field orthogonal to thefirst.
 38. A method of manufacturing an ion mobility spectrometer, themethod comprising the steps of: providing a generally planar resistivesubstrate having a conductive layer provided on two faces thereof;patterning the substrate to provide a filter comprising two or moreinterdigitated electrode arrays defining a plurality of ion channelshaving electrodes disposed proximate said channels; bonding said filteron one face to a generally planar ion detector layer comprising adetector electrode; and attaching said filter on the opposed face to agenerally planar ionization layer comprising means for ionizing ananalyte.
 39. An ion mobility spectrometer comprising an ionizer, aplurality of ion filters, and an ion detector; wherein each ion filterdefines at least one ion channel along which ions may pass from theionizer to the ion detector; and wherein each ion filter comprises aplurality of electrodes disposed proximate the ion channel; thespectrometer further comprising electrode control means for controllingthe electrodes such that a first drive electric field is generated alongthe length of the ion channel, and a second transverse electric field isgenerated orthogonal to the first.
 40. An ion mobility spectrometercomprising an ionizer, an ion filter, and an ion detector; wherein theion filter defines at least one ion channel along which ions may passfrom the ionizer to the ion detector; and wherein the ion filtercomprises a plurality of electrodes disposed proximate the ion channel;the spectrometer further comprising electrode control means forcontrolling the electrodes such that a first drive electric field isgenerated along the length of the ion channel, and a second transverseelectric field is generated orthogonal to the first; and additionalcontrol means for operating the spectrometer periodically to sample atintervals.
 41. An ion filter for use in a spectrometer such as an ionmobility spectrometer, the filter comprising a pair of interdigitaledelectrodes defining a plurality of ion channels along which ions maypass.